BibTeX record journals/mr/HermsWW16

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@article{DBLP:journals/mr/HermsWW16,
  author       = {Martin Herms and
                  Matthias Wagner and
                  Ingrid De Wolf},
  title        = {Copper Through Silicon Vias Studied by Photo-elastic Scanning Infrared
                  Microscopy},
  journal      = {Microelectron. Reliab.},
  volume       = {64},
  pages        = {330--335},
  year         = {2016},
  url          = {https://doi.org/10.1016/j.microrel.2016.07.035},
  doi          = {10.1016/J.MICROREL.2016.07.035},
  timestamp    = {Mon, 28 Mar 2022 11:34:46 +0200},
  biburl       = {https://dblp.org/rec/journals/mr/HermsWW16.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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