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BibTeX record journals/mr/HermsWW16
@article{DBLP:journals/mr/HermsWW16, author = {Martin Herms and Matthias Wagner and Ingrid De Wolf}, title = {Copper Through Silicon Vias Studied by Photo-elastic Scanning Infrared Microscopy}, journal = {Microelectron. Reliab.}, volume = {64}, pages = {330--335}, year = {2016}, url = {https://doi.org/10.1016/j.microrel.2016.07.035}, doi = {10.1016/J.MICROREL.2016.07.035}, timestamp = {Mon, 28 Mar 2022 11:34:46 +0200}, biburl = {https://dblp.org/rec/journals/mr/HermsWW16.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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