BibTeX record journals/mr/HalovaASM05

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@article{DBLP:journals/mr/HalovaASM05,
  author       = {Elena Halova and
                  Sashka Alexandrova and
                  A. Szekeres and
                  Mircea Modreanu},
  title        = {LPCVD-silicon oxynitride films: interface properties},
  journal      = {Microelectron. Reliab.},
  volume       = {45},
  number       = {5-6},
  pages        = {982--985},
  year         = {2005},
  url          = {https://doi.org/10.1016/j.microrel.2004.11.011},
  doi          = {10.1016/J.MICROREL.2004.11.011},
  timestamp    = {Sun, 06 Oct 2024 21:35:08 +0200},
  biburl       = {https://dblp.org/rec/journals/mr/HalovaASM05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}

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