BibTeX record journals/mr/GotoH06

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@article{DBLP:journals/mr/GotoH06,
  author       = {Yasunori Goto and
                  Tomokatsu Higuchi},
  title        = {A 3D analysis technique for detecting trace metal contamination},
  journal      = {Microelectron. Reliab.},
  volume       = {46},
  number       = {9-11},
  pages        = {1542--1547},
  year         = {2006},
  url          = {https://doi.org/10.1016/j.microrel.2006.07.017},
  doi          = {10.1016/J.MICROREL.2006.07.017},
  timestamp    = {Sat, 22 Feb 2020 19:29:23 +0100},
  biburl       = {https://dblp.org/rec/journals/mr/GotoH06.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}