BibTeX record journals/mr/FilipovicSRCS15

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@article{DBLP:journals/mr/FilipovicSRCS15,
  author       = {Lado Filipovic and
                  Anderson Pires Singulani and
                  Frederic Roger and
                  Sara Carniello and
                  Siegfried Selberherr},
  title        = {Intrinsic stress analysis of tungsten-lined open TSVs},
  journal      = {Microelectron. Reliab.},
  volume       = {55},
  number       = {9-10},
  pages        = {1843--1848},
  year         = {2015},
  url          = {https://doi.org/10.1016/j.microrel.2015.06.014},
  doi          = {10.1016/J.MICROREL.2015.06.014},
  timestamp    = {Sat, 30 Sep 2023 10:21:32 +0200},
  biburl       = {https://dblp.org/rec/journals/mr/FilipovicSRCS15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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