BibTeX record journals/mr/FarrellCPAHHM07

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@article{DBLP:journals/mr/FarrellCPAHHM07,
  author       = {Richard A. Farrell and
                  Karim Cherkaoui and
                  Nikolay Petkov and
                  Heinz Amenitsch and
                  Justin D. Holmes and
                  Paul K. Hurley and
                  Michael A. Morris},
  title        = {Physical and electrical properties of low dielectric constant self-assembled
                  mesoporous silica thin films},
  journal      = {Microelectron. Reliab.},
  volume       = {47},
  number       = {4-5},
  pages        = {759--763},
  year         = {2007},
  url          = {https://doi.org/10.1016/j.microrel.2007.01.020},
  doi          = {10.1016/J.MICROREL.2007.01.020},
  timestamp    = {Sat, 30 Sep 2023 10:21:32 +0200},
  biburl       = {https://dblp.org/rec/journals/mr/FarrellCPAHHM07.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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