BibTeX record journals/mr/FangLMHB05

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@article{DBLP:journals/mr/FangLMHB05,
  author       = {Q. Fang and
                  I. Liaw and
                  Mircea Modreanu and
                  Paul K. Hurley and
                  I. W. Boyd},
  title        = {Post deposition UV-induced O\({}_{\mbox{2}}\) annealing of HfO\({}_{\mbox{2}}\)
                  thin films},
  journal      = {Microelectron. Reliab.},
  volume       = {45},
  number       = {5-6},
  pages        = {957--960},
  year         = {2005},
  url          = {https://doi.org/10.1016/j.microrel.2004.11.017},
  doi          = {10.1016/J.MICROREL.2004.11.017},
  timestamp    = {Fri, 27 Aug 2021 14:40:04 +0200},
  biburl       = {https://dblp.org/rec/journals/mr/FangLMHB05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}