BibTeX record journals/mr/FanLKGMH12

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@article{DBLP:journals/mr/FanLKGMH12,
  author       = {Jibin Fan and
                  Hongxia Liu and
                  Qianwei Kuang and
                  Bo Gao and
                  Fei Ma and
                  Yue Hao},
  title        = {Physical properties and electrical characteristics of H\({}_{\mbox{2}}\)O-based
                  and O\({}_{\mbox{3}}\)-based HfO\({}_{\mbox{2}}\) films deposited
                  by {ALD}},
  journal      = {Microelectron. Reliab.},
  volume       = {52},
  number       = {6},
  pages        = {1043--1049},
  year         = {2012},
  url          = {https://doi.org/10.1016/j.microrel.2012.01.010},
  doi          = {10.1016/J.MICROREL.2012.01.010},
  timestamp    = {Sat, 22 Feb 2020 19:29:24 +0100},
  biburl       = {https://dblp.org/rec/journals/mr/FanLKGMH12.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}