BibTeX record journals/mr/EzawaSMT03

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@article{DBLP:journals/mr/EzawaSMT03,
  author       = {Hirokazu Ezawa and
                  Masaharu Seto and
                  Masahiro Miyata and
                  Hiroshi Tazawa},
  title        = {Polymer film deposition with fine pitch openings by stencil printing},
  journal      = {Microelectron. Reliab.},
  volume       = {43},
  number       = {3},
  pages        = {473--479},
  year         = {2003},
  url          = {https://doi.org/10.1016/S0026-2714(02)00327-X},
  doi          = {10.1016/S0026-2714(02)00327-X},
  timestamp    = {Sat, 22 Feb 2020 19:28:04 +0100},
  biburl       = {https://dblp.org/rec/journals/mr/EzawaSMT03.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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