DBLP Record 'journals/mr/EzawaSMT03'

BibTeX

@article{DBLP:journals/mr/EzawaSMT03,
  author    = {Hirokazu Ezawa and
               Masaharu Seto and
               Masahiro Miyata and
               Hiroshi Tazawa},
  title     = {Polymer film deposition with fine pitch openings by stencil
               printing},
  journal   = {Microelectronics Reliability},
  volume    = {43},
  number    = {3},
  year      = {2003},
  pages     = {473-479},
  ee        = {http://dx.doi.org/10.1016/S0026-2714(02)00327-X},
  bibsource = {DBLP, http://dblp.uni-trier.de}
}