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BibTeX record journals/mr/DardalhonBLNPNO02
@article{DBLP:journals/mr/DardalhonBLNPNO02, author = {M. Dardalhon and Vincent Beroulle and Laurent Latorre and Pascal Nouet and Guy Perez and Jean Marc Nicot and Coumar Oud{\'{e}}a}, title = {Reliability analysis of {CMOS} {MEMS} structures obtained by Front Side Bulk Micromachining}, journal = {Microelectron. Reliab.}, volume = {42}, number = {9-11}, pages = {1777--1782}, year = {2002}, url = {https://doi.org/10.1016/S0026-2714(02)00230-5}, doi = {10.1016/S0026-2714(02)00230-5}, timestamp = {Thu, 14 Oct 2021 09:38:47 +0200}, biburl = {https://dblp.org/rec/journals/mr/DardalhonBLNPNO02.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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