BibTeX record journals/mr/ChenS14

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@article{DBLP:journals/mr/ChenS14,
  author       = {Fen Chen and
                  Michael A. Shinosky},
  title        = {Electron fluence driven, Cu catalyzed, interface breakdown mechanism
                  for {BEOL} low-k time dependent dielectric breakdown},
  journal      = {Microelectron. Reliab.},
  volume       = {54},
  number       = {3},
  pages        = {529--540},
  year         = {2014},
  url          = {https://doi.org/10.1016/j.microrel.2013.12.020},
  doi          = {10.1016/J.MICROREL.2013.12.020},
  timestamp    = {Sat, 22 Feb 2020 19:28:13 +0100},
  biburl       = {https://dblp.org/rec/journals/mr/ChenS14.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}

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