BibTeX record journals/mr/BorsoniBGKLRVRW01

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@article{DBLP:journals/mr/BorsoniBGKLRVRW01,
  author       = {G. Borsoni and
                  N. B{\'{e}}chu and
                  M. Gros{-}Jean and
                  Michael L. Korwin{-}Pawlowski and
                  R. Laffitte and
                  V. Le Roux and
                  L. Vallier and
                  N{\'{e}}vine Rochat and
                  C. Wyon},
  title        = {Ultra-thin oxides on silicon fabricated using ultra-slow multicharged
                  ion beams},
  journal      = {Microelectron. Reliab.},
  volume       = {41},
  number       = {7},
  pages        = {1063--1066},
  year         = {2001},
  url          = {https://doi.org/10.1016/S0026-2714(01)00076-2},
  doi          = {10.1016/S0026-2714(01)00076-2},
  timestamp    = {Tue, 28 Mar 2023 19:49:13 +0200},
  biburl       = {https://dblp.org/rec/journals/mr/BorsoniBGKLRVRW01.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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