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BibTeX record journals/mr/BorsoniBGKLRVRW01
@article{DBLP:journals/mr/BorsoniBGKLRVRW01, author = {G. Borsoni and N. B{\'{e}}chu and M. Gros{-}Jean and Michael L. Korwin{-}Pawlowski and R. Laffitte and V. Le Roux and L. Vallier and N{\'{e}}vine Rochat and C. Wyon}, title = {Ultra-thin oxides on silicon fabricated using ultra-slow multicharged ion beams}, journal = {Microelectron. Reliab.}, volume = {41}, number = {7}, pages = {1063--1066}, year = {2001}, url = {https://doi.org/10.1016/S0026-2714(01)00076-2}, doi = {10.1016/S0026-2714(01)00076-2}, timestamp = {Tue, 28 Mar 2023 19:49:13 +0200}, biburl = {https://dblp.org/rec/journals/mr/BorsoniBGKLRVRW01.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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