BibTeX record journals/mr/BirmpiliotisKKP18

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@article{DBLP:journals/mr/BirmpiliotisKKP18,
  author       = {Dimitrios Birmpiliotis and
                  Matroni Koutsoureli and
                  J. Kohylas and
                  George J. Papaioannou and
                  A. Ziaei},
  title        = {Charging mechanisms in Y\({}_{\mbox{2}}\)O\({}_{\mbox{3}}\) dielectric
                  films for {MEMS} capacitive switches},
  journal      = {Microelectron. Reliab.},
  volume       = {88-90},
  pages        = {840--845},
  year         = {2018},
  url          = {https://doi.org/10.1016/j.microrel.2018.07.087},
  doi          = {10.1016/J.MICROREL.2018.07.087},
  timestamp    = {Sun, 02 Oct 2022 15:43:59 +0200},
  biburl       = {https://dblp.org/rec/journals/mr/BirmpiliotisKKP18.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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