BibTeX record journals/mr/BibergerBSBG08

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@article{DBLP:journals/mr/BibergerBSBG08,
  author       = {Roland Biberger and
                  Guenther Benstetter and
                  Thomas Schweinb{\"{o}}ck and
                  Peter Breitschopf and
                  Holger Goebel},
  title        = {Intermittent-contact scanning capacitance microscopy versus contact
                  mode {SCM} applied to 2D dopant profiling},
  journal      = {Microelectron. Reliab.},
  volume       = {48},
  number       = {8-9},
  pages        = {1339--1342},
  year         = {2008},
  url          = {https://doi.org/10.1016/j.microrel.2008.06.013},
  doi          = {10.1016/J.MICROREL.2008.06.013},
  timestamp    = {Wed, 07 Dec 2022 23:04:38 +0100},
  biburl       = {https://dblp.org/rec/journals/mr/BibergerBSBG08.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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