BibTeX record journals/mr/BergersHDG11

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@article{DBLP:journals/mr/BergersHDG11,
  author       = {L. I. J. C. Bergers and
                  J. P. M. Hoefnagels and
                  N. K. R. Delhey and
                  Marc G. D. Geers},
  title        = {Measuring time-dependent deformations in metallic {MEMS}},
  journal      = {Microelectron. Reliab.},
  volume       = {51},
  number       = {6},
  pages        = {1054--1059},
  year         = {2011},
  url          = {https://doi.org/10.1016/j.microrel.2011.03.008},
  doi          = {10.1016/J.MICROREL.2011.03.008},
  timestamp    = {Sat, 22 Feb 2020 19:29:17 +0100},
  biburl       = {https://dblp.org/rec/journals/mr/BergersHDG11.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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