BibTeX record journals/mr/ArbessBTAW15

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@article{DBLP:journals/mr/ArbessBTAW15,
  author       = {Houssam Arbess and
                  F. Baccar and
                  L. Th{\'{e}}olier and
                  Stephane Azzopardi and
                  Eric Woirgard},
  title        = {Mechanical stress investigation after technological process in Deep
                  Trench Termination DT\({}^{\mbox{2}}\) using BenzoCycloButene as dielectric
                  material},
  journal      = {Microelectron. Reliab.},
  volume       = {55},
  number       = {9-10},
  pages        = {2017--2021},
  year         = {2015},
  url          = {https://doi.org/10.1016/j.microrel.2015.07.019},
  doi          = {10.1016/J.MICROREL.2015.07.019},
  timestamp    = {Sun, 25 Jul 2021 11:42:32 +0200},
  biburl       = {https://dblp.org/rec/journals/mr/ArbessBTAW15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}