BibTeX record journals/mr/AllersBBGKL09

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@article{DBLP:journals/mr/AllersBBGKL09,
  author       = {K.{-}H. Allers and
                  Josef B{\"{o}}ck and
                  S. Boguth and
                  K. Goller and
                  Herbert Knapp and
                  Rudolf Lachner},
  title        = {Dielectric thinning model applied to metal insulator metal capacitors
                  with Al\({}_{\mbox{2}}\)O\({}_{\mbox{3}}\) dielectric},
  journal      = {Microelectron. Reliab.},
  volume       = {49},
  number       = {12},
  pages        = {1520--1528},
  year         = {2009},
  url          = {https://doi.org/10.1016/j.microrel.2009.07.027},
  doi          = {10.1016/J.MICROREL.2009.07.027},
  timestamp    = {Sat, 22 Feb 2020 19:27:26 +0100},
  biburl       = {https://dblp.org/rec/journals/mr/AllersBBGKL09.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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