BibTeX record journals/mj/ZhongWT06

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@article{DBLP:journals/mj/ZhongWT06,
  author    = {Z. W. Zhong and
               Z. F. Wang and
               Y. H. Tan},
  title     = {Chemical mechanical polishing of polymeric materials for {MEMS} applications},
  journal   = {Microelectronics Journal},
  volume    = {37},
  number    = {4},
  pages     = {295--301},
  year      = {2006},
  url       = {https://doi.org/10.1016/j.mejo.2005.05.016},
  doi       = {10.1016/j.mejo.2005.05.016},
  timestamp = {Sun, 28 May 2017 13:20:22 +0200},
  biburl    = {https://dblp.org/rec/bib/journals/mj/ZhongWT06},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
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