DBLP Record 'journals/mj/ZhongTSO06'

BibTeX

@article{DBLP:journals/mj/ZhongTSO06,
  author    = {Chuan Jie Zhong and
               Hiroaki Tanaka and
               Shigetoshi Sugawa and
               Tadahiro Ohmi},
  title     = {High quality silicon nitride deposited by Ar/N$_{\mbox{2}}$/H$_{\mbox{2}}$/SiH$_{\mbox{4}}$
               high-density and low energy plasma at low temperature},
  journal   = {Microelectronics Journal},
  volume    = {37},
  number    = {1},
  year      = {2006},
  pages     = {44-49},
  ee        = {http://dx.doi.org/10.1016/j.mejo.2005.06.007},
  bibsource = {DBLP, http://dblp.uni-trier.de}
}