BibTeX record journals/mj/ZhengGSF03

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@article{DBLP:journals/mj/ZhengGSF03,
  author       = {Y. S. Zheng and
                  Q. Guo and
                  Y. J. Su and
                  P. D. Foo},
  title        = {Polymer residue chemical composition analysis and its effect on via
                  contact resistance in dual damascene copper interconnects process
                  integration},
  journal      = {Microelectron. J.},
  volume       = {34},
  number       = {2},
  pages        = {109--113},
  year         = {2003},
  url          = {https://doi.org/10.1016/S0026-2692(02)00154-4},
  doi          = {10.1016/S0026-2692(02)00154-4},
  timestamp    = {Sat, 22 Feb 2020 19:34:16 +0100},
  biburl       = {https://dblp.org/rec/journals/mj/ZhengGSF03.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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