BibTeX record journals/mj/Zheng08

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@article{DBLP:journals/mj/Zheng08,
  author       = {Shuqi Zheng},
  title        = {Investigation of the degradation of smooth SiGe epitaxial layer on
                  Si substrate},
  journal      = {Microelectron. J.},
  volume       = {39},
  number       = {1},
  pages        = {53--56},
  year         = {2008},
  url          = {https://doi.org/10.1016/j.mejo.2007.10.028},
  doi          = {10.1016/J.MEJO.2007.10.028},
  timestamp    = {Sat, 22 Feb 2020 19:34:21 +0100},
  biburl       = {https://dblp.org/rec/journals/mj/Zheng08.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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