Improving hydrogenation efficiency of polycrystalline silicon thin film transistors by a new approach.

Xiangbin Zeng X. W. Sun Johnny K. O. Sin Improving hydrogenation efficiency of polycrystalline silicon thin film transistors by a new approach. 1079-1085 2003 34 Microelectronics Journal 11 http://dx.doi.org/10.1016/j.mejo.2003.09.007 db/journals/mj/mj34.html#ZengSS03