BibTeX record journals/mj/ZambomMM09

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@article{DBLP:journals/mj/ZambomMM09,
  author       = {Lu{\'{\i}}s da Silva Zambom and
                  Ronaldo Domingues Mansano and
                  Ana Paula Mousinho},
  title        = {Low-temperature deposition of silicon oxide and silicon nitride by
                  reactive magnetron sputtering},
  journal      = {Microelectron. J.},
  volume       = {40},
  number       = {1},
  pages        = {66--69},
  year         = {2009},
  url          = {https://doi.org/10.1016/j.mejo.2008.07.017},
  doi          = {10.1016/J.MEJO.2008.07.017},
  timestamp    = {Sat, 22 Feb 2020 19:33:43 +0100},
  biburl       = {https://dblp.org/rec/journals/mj/ZambomMM09.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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