BibTeX record journals/mj/YangLWBL04

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@article{DBLP:journals/mj/YangLWBL04,
  author       = {Zunxian Yang and
                  Xinxin Li and
                  Yuelin Wang and
                  Haifei Bao and
                  Min Liu},
  title        = {Micro cantilever probe array integrated with Piezoresistive sensor},
  journal      = {Microelectron. J.},
  volume       = {35},
  number       = {5},
  pages        = {479--483},
  year         = {2004},
  url          = {https://doi.org/10.1016/j.mejo.2003.12.001},
  doi          = {10.1016/J.MEJO.2003.12.001},
  timestamp    = {Sat, 30 Sep 2023 10:21:21 +0200},
  biburl       = {https://dblp.org/rec/journals/mj/YangLWBL04.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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