BibTeX record journals/mj/YangC06

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@article{DBLP:journals/mj/YangC06,
  author       = {Yung{-}Kuang Yang and
                  Tsun{-}Ching Chang},
  title        = {Experimental analysis and optimization of a photo resist coating process
                  for photolithography in wafer fabrication},
  journal      = {Microelectron. J.},
  volume       = {37},
  number       = {8},
  pages        = {746--751},
  year         = {2006},
  url          = {https://doi.org/10.1016/j.mejo.2005.10.006},
  doi          = {10.1016/J.MEJO.2005.10.006},
  timestamp    = {Sat, 22 Feb 2020 19:33:55 +0100},
  biburl       = {https://dblp.org/rec/journals/mj/YangC06.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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