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BibTeX record journals/mj/XiaoYY06
@article{DBLP:journals/mj/XiaoYY06, author = {Xia Xiao and Xueyi You and Suying Yao}, title = {Theoretical study of mechanical properties of multi-layer {ULSI} interconnect dielectrics by surface acoustic wave method}, journal = {Microelectron. J.}, volume = {37}, number = {10}, pages = {1052--1055}, year = {2006}, url = {https://doi.org/10.1016/j.mejo.2006.04.005}, doi = {10.1016/J.MEJO.2006.04.005}, timestamp = {Sat, 22 Feb 2020 19:34:05 +0100}, biburl = {https://dblp.org/rec/journals/mj/XiaoYY06.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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