BibTeX record journals/mj/WangCDY07

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@article{DBLP:journals/mj/WangCDY07,
  author       = {Ying Wang and
                  Fei Cao and
                  Minghui Ding and
                  Dawei Yang},
  title        = {Investigation of Zr-N thin films for use as diffusion barrier in Cu
                  metallization},
  journal      = {Microelectron. J.},
  volume       = {38},
  number       = {8-9},
  pages        = {910--914},
  year         = {2007},
  url          = {https://doi.org/10.1016/j.mejo.2007.06.001},
  doi          = {10.1016/J.MEJO.2007.06.001},
  timestamp    = {Thu, 21 Jan 2021 12:29:41 +0100},
  biburl       = {https://dblp.org/rec/journals/mj/WangCDY07.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}

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