DBLP Record 'journals/mj/WangCDY07'

BibTeX

@article{DBLP:journals/mj/WangCDY07,
  author    = {Ying Wang and
               Fei Cao and
               Minghui Ding and
               Dawei Yang},
  title     = {Investigation of Zr-N thin films for use as diffusion barrier
               in Cu metallization},
  journal   = {Microelectronics Journal},
  volume    = {38},
  number    = {8-9},
  year      = {2007},
  pages     = {910-914},
  ee        = {http://dx.doi.org/10.1016/j.mejo.2007.06.001},
  bibsource = {DBLP, http://dblp.uni-trier.de}
}