BibTeX record journals/mj/SinghMM03

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@article{DBLP:journals/mj/SinghMM03,
  author       = {Navab Singh and
                  Moitreyee Mukherjee{-}Roy and
                  Sohan Singh Mehta},
  title        = {Defocusing image to pattern contact holes using attenuated phase shift
                  masks},
  journal      = {Microelectron. J.},
  volume       = {34},
  number       = {4},
  pages        = {237--245},
  year         = {2003},
  url          = {https://doi.org/10.1016/S0026-2692(03)00005-3},
  doi          = {10.1016/S0026-2692(03)00005-3},
  timestamp    = {Sat, 22 Feb 2020 19:34:03 +0100},
  biburl       = {https://dblp.org/rec/journals/mj/SinghMM03.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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