Different aspect ratio pyramidal tips obtained by wet etching of (100) and (111) silicon.

Drago Resnik Danilo Vrtacnik Uros Aljancic Matej Mozek Slavko Amon Different aspect ratio pyramidal tips obtained by wet etching of (100) and (111) silicon. 591-593 2003 34 Microelectronics Journal 5-8 http://dx.doi.org/10.1016/S0026-2692(03)00056-9 db/journals/mj/mj34.html#ResnikVAMA03