BibTeX record journals/mj/OrlovIPSVH05

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@article{DBLP:journals/mj/OrlovIPSVH05,
  author       = {L. K. Orlov and
                  N. L. Ivina and
                  A. V. Potapov and
                  T. N. Smyslova and
                  L. M. Vinogradsky and
                  Z. J. Horvath},
  title        = {Kinetics of hydride disintegration in a 2D Si channel formation by
                  the Si-GeH\({}_{\mbox{4}}\) {MBE} and demonstration of a Si/SiGe interface
                  blurring in electrical characteristics of heterostructures},
  journal      = {Microelectron. J.},
  volume       = {36},
  number       = {3-6},
  pages        = {518--521},
  year         = {2005},
  url          = {https://doi.org/10.1016/j.mejo.2005.02.106},
  doi          = {10.1016/J.MEJO.2005.02.106},
  timestamp    = {Sat, 22 Feb 2020 19:34:25 +0100},
  biburl       = {https://dblp.org/rec/journals/mj/OrlovIPSVH05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}