BibTeX record journals/mj/MukhiyaBBLZ11

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@article{DBLP:journals/mj/MukhiyaBBLZ11,
  author       = {Ravindra Mukhiya and
                  Alvise Bagolini and
                  T. K. Bhattacharyya and
                  Leandro Lorenzelli and
                  M. Zen},
  title        = {Experimental study and analysis of corner compensation structures
                  for {CMOS} compatible bulk micromachining using 25 wt{\%} {TMAH}},
  journal      = {Microelectron. J.},
  volume       = {42},
  number       = {1},
  pages        = {127--134},
  year         = {2011},
  url          = {https://doi.org/10.1016/j.mejo.2010.08.018},
  doi          = {10.1016/J.MEJO.2010.08.018},
  timestamp    = {Fri, 27 Aug 2021 02:08:17 +0200},
  biburl       = {https://dblp.org/rec/journals/mj/MukhiyaBBLZ11.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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