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BibTeX record journals/mj/MukhiyaBBLZ11
@article{DBLP:journals/mj/MukhiyaBBLZ11, author = {Ravindra Mukhiya and Alvise Bagolini and T. K. Bhattacharyya and Leandro Lorenzelli and M. Zen}, title = {Experimental study and analysis of corner compensation structures for {CMOS} compatible bulk micromachining using 25 wt{\%} {TMAH}}, journal = {Microelectron. J.}, volume = {42}, number = {1}, pages = {127--134}, year = {2011}, url = {https://doi.org/10.1016/j.mejo.2010.08.018}, doi = {10.1016/J.MEJO.2010.08.018}, timestamp = {Fri, 27 Aug 2021 02:08:17 +0200}, biburl = {https://dblp.org/rec/journals/mj/MukhiyaBBLZ11.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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