BibTeX record journals/mj/LingSCWYM06

download as .bib file

@article{DBLP:journals/mj/LingSCWYM06,
  author       = {Ling Li and
                  Shibing Long and
                  Congshun Wang and
                  Wengang Wu and
                  Yilong Hao and
                  Ming Liu},
  title        = {Modeling and simulation development of electron beam resist based
                  on cellular automata},
  journal      = {Microelectron. J.},
  volume       = {37},
  number       = {4},
  pages        = {317--320},
  year         = {2006},
  url          = {https://doi.org/10.1016/j.mejo.2005.05.028},
  doi          = {10.1016/J.MEJO.2005.05.028},
  timestamp    = {Sat, 22 Feb 2020 19:34:39 +0100},
  biburl       = {https://dblp.org/rec/journals/mj/LingSCWYM06.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
a service of  Schloss Dagstuhl - Leibniz Center for Informatics

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.