BibTeX record journals/mj/KuoCL04

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@article{DBLP:journals/mj/KuoCL04,
  author       = {Yang{-}Kuao Kuo and
                  Chuen{-}Guang Chao and
                  Chi{-}Yuan Lin},
  title        = {Analysis of instability line width and white wall created by the photolithography
                  process},
  journal      = {Microelectron. J.},
  volume       = {35},
  number       = {11},
  pages        = {915--922},
  year         = {2004},
  url          = {https://doi.org/10.1016/j.mejo.2004.06.023},
  doi          = {10.1016/J.MEJO.2004.06.023},
  timestamp    = {Sat, 22 Feb 2020 19:33:55 +0100},
  biburl       = {https://dblp.org/rec/journals/mj/KuoCL04.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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