BibTeX record journals/mj/KinderVKSLSC06

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@article{DBLP:journals/mj/KinderVKSLSC06,
  author       = {R. Kinder and
                  A. Vincze and
                  M. Kuruc and
                  R. Srn{\'{a}}nek and
                  B. Lojek and
                  B. Sopko and
                  D. Chren},
  title        = {Investigation of the implanted phosphorus in a boron doped SiGe epitaxial
                  layer},
  journal      = {Microelectron. J.},
  volume       = {37},
  number       = {7},
  pages        = {642--645},
  year         = {2006},
  url          = {https://doi.org/10.1016/j.mejo.2005.07.010},
  doi          = {10.1016/J.MEJO.2005.07.010},
  timestamp    = {Sat, 22 Feb 2020 19:34:14 +0100},
  biburl       = {https://dblp.org/rec/journals/mj/KinderVKSLSC06.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}