BibTeX record journals/mj/JingCFHLC07

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@article{DBLP:journals/mj/JingCFHLC07,
  author       = {Xiang{-}meng Jing and
                  Di Chen and
                  Dong{-}Ming Fang and
                  Chuang Huang and
                  Jing{-}Quan Liu and
                  Xiang Chen},
  title        = {Multi-layer microstructure fabrication by combining bulk silicon micromachining
                  and {UV-LIGA} technology},
  journal      = {Microelectron. J.},
  volume       = {38},
  number       = {1},
  pages        = {120--124},
  year         = {2007},
  url          = {https://doi.org/10.1016/j.mejo.2006.09.003},
  doi          = {10.1016/J.MEJO.2006.09.003},
  timestamp    = {Sat, 11 Feb 2023 18:13:46 +0100},
  biburl       = {https://dblp.org/rec/journals/mj/JingCFHLC07.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}