BibTeX record journals/mj/HuangLLBTY20a

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@article{DBLP:journals/mj/HuangLLBTY20a,
  author       = {Ning Huang and
                  Weijing Liu and
                  Qinghua Li and
                  Wei Bai and
                  Xiadong Tang and
                  Ting Yang},
  title        = {Thermal and electrical performance investigation of FinFET with encased
                  air-gap gate sidewalls from spacer encapsulation layer material and
                  structure parameter perspectives},
  journal      = {Microelectron. J.},
  volume       = {103},
  pages        = {104846},
  year         = {2020},
  url          = {https://doi.org/10.1016/j.mejo.2020.104846},
  doi          = {10.1016/J.MEJO.2020.104846},
  timestamp    = {Sun, 02 Oct 2022 15:43:45 +0200},
  biburl       = {https://dblp.org/rec/journals/mj/HuangLLBTY20a.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}