FanZLHJ06'

BibTeX

@article{DBLP:journals/mj/FanZLHJ06,
  author    = {Xiqiu Fan and
               Honghai Zhang and
               Sheng Liu and
               Xiaofeng Hu and
               Ke Jia},
  title     = {NIL - a low-cost and high-throughput MEMS fabrication method
               compatible with IC manufacturing technology},
  journal   = {Microelectronics Journal},
  volume    = {37},
  number    = {2},
  year      = {2006},
  pages     = {121-126},
  ee        = {http://dx.doi.org/10.1016/j.mejo.2005.04.047},
  bibsource = {DBLP, http://dblp.uni-trier.de}
}