BibTeX record journals/mj/ChungK08

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@article{DBLP:journals/mj/ChungK08,
  author       = {Gwiy{-}Sang Chung and
                  Kang{-}San Kim},
  title        = {Raman scattering of polycrystalline 3C-SiC film deposited on AlN buffer
                  layer by using {CVD} with {HMDS}},
  journal      = {Microelectron. J.},
  volume       = {39},
  number       = {12},
  pages        = {1405--1407},
  year         = {2008},
  url          = {https://doi.org/10.1016/j.mejo.2008.06.053},
  doi          = {10.1016/J.MEJO.2008.06.053},
  timestamp    = {Sat, 22 Feb 2020 19:34:45 +0100},
  biburl       = {https://dblp.org/rec/journals/mj/ChungK08.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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