BibTeX record journals/mj/ChenLYD07a

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@article{DBLP:journals/mj/ChenLYD07a,
  author       = {Changchun Chen and
                  Jiangfeng Liu and
                  Benhai Yu and
                  Qirun Dai},
  title        = {Investigation of Si/SiGe/Si heterostructure implanted by {H} ion and
                  annealed in vacuum and dry O\({}_{\mbox{2}}\) ambient},
  journal      = {Microelectron. J.},
  volume       = {38},
  number       = {6-7},
  pages        = {800--804},
  year         = {2007},
  url          = {https://doi.org/10.1016/j.mejo.2007.04.002},
  doi          = {10.1016/J.MEJO.2007.04.002},
  timestamp    = {Sat, 22 Feb 2020 19:34:43 +0100},
  biburl       = {https://dblp.org/rec/journals/mj/ChenLYD07a.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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