BibTeX record journals/mj/ChenLYD07

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@article{DBLP:journals/mj/ChenLYD07,
  author       = {Changchun Chen and
                  Jiangfeng Liu and
                  Benhai Yu and
                  Qirun Dai},
  title        = {Determination of boron concentration in heavily doped p-type Si\({}_{\mbox{1-x}}\)Ge\({}_{\mbox{x}}\)/Si
                  heterostructure by infrared ellipsometric spectroscopy},
  journal      = {Microelectron. J.},
  volume       = {38},
  number       = {3},
  pages        = {392--397},
  year         = {2007},
  url          = {https://doi.org/10.1016/j.mejo.2007.01.019},
  doi          = {10.1016/J.MEJO.2007.01.019},
  timestamp    = {Sat, 22 Feb 2020 19:33:49 +0100},
  biburl       = {https://dblp.org/rec/journals/mj/ChenLYD07.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}

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