BibTeX record journals/mj/ChenCS04

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@article{DBLP:journals/mj/ChenCS04,
  author       = {Ping Hsun Chen and
                  Tate Chen and
                  Han Chang Shih},
  title        = {Spin-on-glass {(SOG)} process-induced tungsten residue in a semiconductor
                  manufacturing procedure},
  journal      = {Microelectron. J.},
  volume       = {35},
  number       = {12},
  pages        = {985--987},
  year         = {2004},
  url          = {https://doi.org/10.1016/j.mejo.2004.06.021},
  doi          = {10.1016/J.MEJO.2004.06.021},
  timestamp    = {Sat, 22 Feb 2020 19:34:26 +0100},
  biburl       = {https://dblp.org/rec/journals/mj/ChenCS04.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}

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