BibTeX record journals/mj/ChangS07

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@article{DBLP:journals/mj/ChangS07,
  author       = {Shang{-}Chou Chang and
                  Ming{-}Hua Shiao},
  title        = {Smooth indium zinc oxide film prepared by sputtering a In\({}_{\mbox{2}}\)O\({}_{\mbox{3}}\):
                  ZnO=95: 5 target},
  journal      = {Microelectron. J.},
  volume       = {38},
  number       = {12},
  pages        = {1202--1206},
  year         = {2007},
  url          = {https://doi.org/10.1016/j.mejo.2007.09.014},
  doi          = {10.1016/J.MEJO.2007.09.014},
  timestamp    = {Sat, 22 Feb 2020 19:34:03 +0100},
  biburl       = {https://dblp.org/rec/journals/mj/ChangS07.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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