BibTeX record journals/mj/ChanTT06

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@article{DBLP:journals/mj/ChanTT06,
  author       = {Kah{-}Yoong Chan and
                  Teck{-}Yong Tou and
                  Bee{-}San Teo},
  title        = {Thickness dependence of the structural and electrical properties of
                  copper films deposited by dc magnetron sputtering technique},
  journal      = {Microelectron. J.},
  volume       = {37},
  number       = {7},
  pages        = {608--612},
  year         = {2006},
  url          = {https://doi.org/10.1016/j.mejo.2005.09.016},
  doi          = {10.1016/J.MEJO.2005.09.016},
  timestamp    = {Sat, 22 Feb 2020 19:34:21 +0100},
  biburl       = {https://dblp.org/rec/journals/mj/ChanTT06.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}

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