BibTeX record journals/mj/BiswasDMKL06

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@article{DBLP:journals/mj/BiswasDMKL06,
  author       = {Kanishka Biswas and
                  Soumen K. Das and
                  D. K. Maurya and
                  S. Kal and
                  S. K. Lahiri},
  title        = {Bulk micromachining of silicon in TMAH-based etchants for aluminum
                  passivation and smooth surface},
  journal      = {Microelectron. J.},
  volume       = {37},
  number       = {4},
  pages        = {321--327},
  year         = {2006},
  url          = {https://doi.org/10.1016/j.mejo.2005.05.013},
  doi          = {10.1016/J.MEJO.2005.05.013},
  timestamp    = {Sat, 30 Sep 2023 10:21:17 +0200},
  biburl       = {https://dblp.org/rec/journals/mj/BiswasDMKL06.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}