BiswasDMKL06'

@article{DBLP:journals/mj/BiswasDMKL06,
  author    = {K. Biswas and
               S. Das and
               D. K. Maurya and
               S. Kal and
               S. K. Lahiri},
  title     = {Bulk micromachining of silicon in TMAH-based etchants for
               aluminum passivation and smooth surface},
  journal   = {Microelectronics Journal},
  volume    = {37},
  number    = {4},
  year      = {2006},
  pages     = {321-327},
  ee        = {http://dx.doi.org/10.1016/j.mejo.2005.05.013},
  bibsource = {DBLP, http://dblp.uni-trier.de}
}