BibTeX record journals/micromachines/ZhangYSHZN15

download as .bib file

@article{DBLP:journals/micromachines/ZhangYSHZN15,
  author       = {Meng Zhang and
                  Jian Yang and
                  Chaowei Si and
                  Guowei Han and
                  Yongmei Zhao and
                  Jin Ning},
  title        = {Research on the Piezoelectric Properties of AlN Thin Films for {MEMS}
                  Applications},
  journal      = {Micromachines},
  volume       = {6},
  number       = {9},
  pages        = {1236--1248},
  year         = {2015},
  url          = {https://doi.org/10.3390/mi6091236},
  doi          = {10.3390/MI6091236},
  timestamp    = {Tue, 18 Jun 2024 09:26:26 +0200},
  biburl       = {https://dblp.org/rec/journals/micromachines/ZhangYSHZN15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
a service of  Schloss Dagstuhl - Leibniz Center for Informatics

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.