BibTeX record journals/micromachines/YangSHZMZN15

download as .bib file

@article{DBLP:journals/micromachines/YangSHZMZN15,
  author       = {Jian Yang and
                  Chaowei Si and
                  Guowei Han and
                  Meng Zhang and
                  Liuhong Ma and
                  Yongmei Zhao and
                  Jin Ning},
  title        = {Researching the Aluminum Nitride Etching Process for Application in
                  {MEMS} Resonators},
  journal      = {Micromachines},
  volume       = {6},
  number       = {2},
  pages        = {281--290},
  year         = {2015},
  url          = {https://doi.org/10.3390/mi6020281},
  doi          = {10.3390/MI6020281},
  timestamp    = {Tue, 18 Jun 2024 09:26:26 +0200},
  biburl       = {https://dblp.org/rec/journals/micromachines/YangSHZMZN15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.