BibTeX record journals/micromachines/LuZJHZS16

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@article{DBLP:journals/micromachines/LuZJHZS16,
  author       = {Han Lu and
                  Hua Zhang and
                  Mingliang Jin and
                  Tao He and
                  Guofu Zhou and
                  Lingling Shui},
  title        = {Two-Layer Microstructures Fabricated by One-Step Anisotropic Wet Etching
                  of Si in {KOH} Solution},
  journal      = {Micromachines},
  volume       = {7},
  number       = {2},
  pages        = {19},
  year         = {2016},
  url          = {https://doi.org/10.3390/mi7020019},
  doi          = {10.3390/MI7020019},
  timestamp    = {Mon, 29 Jul 2019 15:59:18 +0200},
  biburl       = {https://dblp.org/rec/journals/micromachines/LuZJHZS16.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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