BibTeX record journals/micromachines/EsashiT16

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@article{DBLP:journals/micromachines/EsashiT16,
  author       = {Masayoshi Esashi and
                  Shuji Tanaka},
  title        = {Stacked Integration of {MEMS} on {LSI}},
  journal      = {Micromachines},
  volume       = {7},
  number       = {8},
  pages        = {137},
  year         = {2016},
  url          = {https://doi.org/10.3390/mi7080137},
  doi          = {10.3390/MI7080137},
  timestamp    = {Sat, 30 May 2020 19:51:48 +0200},
  biburl       = {https://dblp.org/rec/journals/micromachines/EsashiT16.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}

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