BibTeX record journals/jim/KimJK21

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@article{DBLP:journals/jim/KimJK21,
  author       = {Sinyoung Kim and
                  Jaeyeon Jang and
                  Chang Ouk Kim},
  title        = {A run-to-run controller for a chemical mechanical planarization process
                  using least squares generative adversarial networks},
  journal      = {J. Intell. Manuf.},
  volume       = {32},
  number       = {8},
  pages        = {2267--2280},
  year         = {2021},
  url          = {https://doi.org/10.1007/s10845-020-01639-1},
  doi          = {10.1007/S10845-020-01639-1},
  timestamp    = {Mon, 03 Jan 2022 21:53:23 +0100},
  biburl       = {https://dblp.org/rec/journals/jim/KimJK21.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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