BibTeX record journals/jicce/MunKJ12

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@article{DBLP:journals/jicce/MunKJ12,
  author       = {Seong{-}Yeol Mun and
                  Seong{-}Jun Kang and
                  Yang{-}Hee Joung},
  title        = {Humidity Induced Defect Generation and Its Control during Organic
                  Bottom Anti-reflective Coating in the Photo Lithography Process of
                  Semiconductors},
  journal      = {J. Inform. and Commun. Convergence Engineering},
  volume       = {10},
  number       = {3},
  pages        = {295--299},
  year         = {2012},
  url          = {https://doi.org/10.6109/jicce.2012.10.3.295},
  doi          = {10.6109/JICCE.2012.10.3.295},
  timestamp    = {Tue, 16 Feb 2021 15:57:19 +0100},
  biburl       = {https://dblp.org/rec/journals/jicce/MunKJ12.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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