Eric Kirkland Thomas R. Kurfess Steven Y. Liang An Optical Coordinate Measuring Machine for Nanoscale Dimensional Metrology. 39-44 2004 8 JACIII 1 http://www.fujipress.jp/finder/xslt.php?mode=present&inputfile=JACII000800010006.xml db/journals/jaciii/jaciii8.html#KirklandKL04